Within this paper, The brand new lapping slurry and sprucing slurry are introduced. Along with the deliquescence degree of CLBO is fallen to cheapest. A brand new Functioning technology is also adopted. Soon after rough sharpening, the focus of extremely-precision sharpening slurry is elevated adequately. So does the ultra-precision polishing speed, as well as wiping pace is quicker compared to the deliquescence velocity. The CLBO crystal area roughness can reach 1nm and hold the floor quality well. Entry by means of your establishment
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Based on the evidence-of-principle experiment, the conversion efficiency of 23% implied the opportunity of reaching large-electricity at the 2nd Stokes wavelength on the Raman laser. If your pump laser of 1078 nm may be received at the standard electric power of fifty W, the output ability of its 2nd Stokes wavelength at 1512 nm could be greater than 10 W. The design of your Raman laser cavity must be optimized so that you can stay away from the injury from the M1 and diamond surface.
The average energy of the NIR laser however has the probable for being improved to tens of watts such as 70 W [26] In the event the double-go configuration could possibly be utilized for that Yb:YAG SCF amplifier phase. Consequently, In case the conversion performance of 31% from NIR to DUV may very well be even now preserved at this bigger energy problem, the typical output electric power of the DUV laser at 258 nm may be much more than twenty W, which would be considered a amazing ability level with the DUV laser and produce the unanticipated DUV laser machining outcomes. Furthermore, for prime-power DUV laser, the UV harm on the nonlinear crystal, such as the windows for CLBO crystal and also the mirrors, is an additional vital parameter for long-lasting and secure Procedure.
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LBO can be a great nonlinear crystal which is usually applied to the SHG with the NIR into the inexperienced. The DUV laser is generally recognized by two phases of SFG in the LBO crystals since there is not any phase-matching angle for LBO to convert the inexperienced laser at 515 nm or 532 nm to your DUV right by SHG [sixteen]. A short while ago, the NSBBF crystal has also demonstrated its potential to acquire a high conversion efficiency from 532 nm to 266 nm. The walk-off angle and deff on the NSBBF are Pretty much similar to People of CLBO [17].
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Cesium Lithium Borate (CsLiB6O10 or CLBO) is the most effective non-linear crystal which generates ultraviolet harmonics in the Nd:YAG essential laser wavelength. So as to enhance the injury threshold, small CLBO area roughness, by extremely-precision machining, is needed. Since the CLBO crystal has effortless hydroscopic response and micro scratches in machining, ultra-exact machining from the CLBO crystal is usually a hard technical issue.
The beam profile shown in Determine 7b shown a good beam good quality as on the list of deserves of Raman laser, which would be beneficial to deliver a 193-nm DUV laser with a top quality beam.
The conversion effectiveness from basic NIR to DUV is from five% to 36% based on the documented results in Table 1. Raising the conversion effectiveness will reduce the burden on the look and setup of the basic laser amplifier as well as the electric powered electricity use. An excellent beam quality of the basic laser can even contribute to your escalating with the conversion performance along with the suitable ability depth of your NIR and environmentally friendly laser inside the SHG and FHG procedure, respectively. The very best conversion efficiencies from NIR to environmentally friendly and inexperienced to DUV laser by usage of CLBO crystal are 70% and all-around fifty%, respectively [twelve], which corresponds into the conversion performance of 35% from fundamental to DUV.
The development of the 193-nm laser was demonstrated by stages of SFG. So as to scale the DUV laser electrical power effectively, a different principle of your 193-nm DUV laser generation is introduced based on the diamond Raman laser.